MEMS Module. Multistage Micro-Hydraulic Displacement Ampl...
Akademische Arbeit aus dem Jahr 2016 im Fachbereich Elektrotechnik, , Sprache: Deutsch, Abstract: This paper explains the importance of Micro-Electro-Mechanical Systems (MEMS) in the modern world. The last 30 years of Micro-Electro-Mechanical Systems (MEMS) have been seen as an era of exponential development of electronic devices such as sensors and actuators on the order of micro dimension. Throughout these three ...