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Acoustic Simulation and Characterization of Capacitive Micromachined Ultrasonic Transducers
Ultrasonic transducers are used in many fi elds of daily life, e.g. as parking aids or medical devices. To enable their usage also for mass applications small and low-cost transducers with high performance are required. Capacitive, micromachined ultrasonic transducers (CMUT) offer the potential, for instance, to integrate compact ultrasonic sensor systems into mobile phones or as disposable transducer for diverse ...

54,50 CHF